Introduction to microlithography : theory, materials, and processing /

Bibliographic Details

Corporate Authors:	American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Format:	Book
Language:	English
Published:	Washington, D.C. : The Society, 1983.
Series:	ACS symposium series ; 219.
Subjects:	Photolithography > Congresses. Photoresists > Congresses.