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Author:
French, Patrick J.
AND
Semiconductor Equipment and Materials International
Language:
English
Suggested Topics:
Electromechanical devices
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Author:
French, Patrick J.
AND
Semiconductor Equipment and Materials International
Language:
English
Suggested Topics:
Electromechanical devices
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Dispositifs électromécaniques
2
Electromechanical devices
Micro-usinage
2
Micromachining
2
Micromechanics
2
Micromécanique
2
CONFERENCES
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ELECTROMECHANICAL DEVICES
1
FABRICATION
1
MECHANICAL PROPERTIES
1
MICROELECTRONICS
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MICROINSTRUMENTATION
1
MICROMACHINING
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MICROMECHANICS
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MODELING
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Micromachined devices and components III : 29 September 1997, Austin, Texas /
Published 1997
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Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California /
Published 1998
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Format
Book
2
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Author
Chau, Kevin
2
French, Patrick J.
Semiconductor Equipment and Materials International
Society of Photo-optical Instrumentation Engineers
2
National Institute of Standards and Technology (U.S.)
1
Call Number
T - Technology
2
Genre
Conference papers and proceedings
2
Congresses
2
Congrès
2
Suggested Topics
Dispositifs électromécaniques
2
Electromechanical devices
Micro-usinage
2
Micromachining
2
Micromechanics
2
Micromécanique
2
more ...
CONFERENCES
1
ELECTROMECHANICAL DEVICES
1
FABRICATION
1
MECHANICAL PROPERTIES
1
MICROELECTRONICS
1
MICROINSTRUMENTATION
1
MICROMACHINING
1
MICROMECHANICS
1
MODELING
1
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Institution
Rensselaer Polytechnic Institute
2
Language
English
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