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Author:
Yoshihara, Hideo
Suggested Topics:
Masks
AND
X-ray lithography
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Author:
Yoshihara, Hideo
Suggested Topics:
Masks
AND
X-ray lithography
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Circuits intégrés
3
Integrated circuits
3
Lithographie par rayons X
3
Masks
Masks (Electronics)
3
Masques
3
Masques (Électronique)
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Microlithographie
3
Microlithography
3
X-ray lithography
Design and construction
1
Kongreß
1
Maskentechnik
1
Optoelectronic devices
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1
Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan /
Published 1994
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Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan /
Published 1995
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Photomask and X-ray mask technology III : 18-19 April, 1996, Kawasaki City, Kanagawa, Japan /
Published 1996
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Format
Book
3
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Author
BACUS (Technical group)
3
Society of Photo-optical Instrumentation Engineers
3
Yoshihara, Hideo
Photomask Japan
2
Society of Photo-optical Instrumentation Engineers. Japan Chapter
2
Call Number
T - Technology
3
Genre
Conference papers and proceedings
3
Congresses
3
Congrès
3
Kawasaki (1994)
1
Suggested Topics
Circuits intégrés
3
Integrated circuits
3
Lithographie par rayons X
3
Masks
Masks (Electronics)
3
Masques
3
more ...
Masques (Électronique)
3
Microlithographie
3
Microlithography
3
X-ray lithography
Design and construction
1
Kongreß
1
Maskentechnik
1
Optoelectronic devices
1
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Institution
Rensselaer Polytechnic Institute
3
Language
English
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