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T - Technology
Author:
American Chemical Society. Meeting
AND
Bowden, M. J., 1943-
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Call Number:
T - Technology
Author:
American Chemical Society. Meeting
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Bowden, M. J., 1943-
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Polymers for high technology : electronics and photonics : developed from a symposium sponsored by the Division of Polymeric Materials--Science and Engineering at the 192nd Meeting...
Published 1987
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Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Mee...
Published 1983
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Polymers for high technology : electronics and photonics /
Published 1987
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Introduction to microlithography : theory, materials, and processing /
Published 1983
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Format
Book
4
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Author
American Chemical Society. Meeting
Bowden, M. J., 1943-
American Chemical Society. Division of Organic Coatings and Plastics Chemistry
2
American Chemical Society. Division of Polymeric Materials: Science and Engineering
2
Thompson, L. F., 1944-
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Turner, S. Richard, 1942-
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Willson, C. G. (C. Grant), 1939-
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Call Number
T - Technology
Genre
Conference papers and proceedings
2
Congresses
2
Congrès
2
Suggested Topics
Photoresists
4
Microlithography
3
Congresses
2
Materials
2
Microelectronics
2
Microlithographie
2
more ...
Photolithography
2
Polymers
2
Résines photosensibles
2
Attaque chimique
1
Congrès
1
Etching
1
Gravure par plasma
1
Matériaux
1
Microélectronique
1
Photolithographie
1
Plasma etching
1
Polymères
1
Semi-conducteurs
1
Semiconductors
1
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Institution
Rensselaer Polytechnic Institute
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Rochester Institute of Technology
2
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English
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