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1

Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984 /

Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of...

Published 1984

Book

2

Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983 /

Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Mee...

Published 1983

Book

3

Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992 /

Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the America...

Published 1994

Book

4

Materials for microlithography : radiation-sensitive polymers /

Materials for microlithography : radiation-sensitive polymers /

Published 1984

Book

5

Polymers for microelectronics : resists and dielectrics /

Polymers for microelectronics : resists and dielectrics /

Published 1994

Book

6

Introduction to microlithography : theory, materials, and processing /

Introduction to microlithography : theory, materials, and processing /

Published 1983

Book