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Call Number:
T - Technology
Genre:
Congresses
Institution:
Rochester Institute of Technology
Suggested Topics:
Integrated circuits
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Microlithography
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Call Number:
T - Technology
Genre:
Congresses
Institution:
Rochester Institute of Technology
Suggested Topics:
Integrated circuits
AND
Microlithography
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Circuits intégrés
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Integrated circuits
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64- to 256-megabit reticle generation : technology requirements and approaches /
Published 1994
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Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /
Published 2000
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Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000,...
Published 2001
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Merhari, Lhadi
2
BACUS (Technical group)
1
Hearn, Gregory K.
1
Society of Photo-optical Instrumentation Engineers
1
Call Number
T - Technology
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Conference papers and proceedings
3
Congresses
Congrès
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Kongress
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Boston (Mass., 1999)
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Boston (Mass., 2000)
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Suggested Topics
Circuits intégrés
3
Design and construction
3
Integrated circuits
Microlithographie
3
Microlithography
Conception et construction
2
more ...
Électronique moléculaire
2
Molecular electronics
2
Nanotechnologie
2
Nanotechnology
2
CONFERENCES
1
DESIGN
1
INTEGRATED CIRCUITS
1
Integrierte Schaltung
1
Kongress
1
LITHOGRAPHY
1
MASKS
1
Masks
1
Masques
1
Materials
1
Matériaux
1
Mikroelektronik
1
Photonics
1
Photonique
1
Reticles
1
Réticules (Optique)
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Semiconductor storage devices
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1999
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2000
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Boston (Mass.)
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Rensselaer Polytechnic Institute
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Rochester Institute of Technology
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