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1
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 13-15 January, 2003, Sonthofen, Germany /
Published 2003
Conference Proceeding Book
2
21st Annual BACUS Symposium on Photomask Technology, 3-5 October, 2001 Monterey [California], USA /
Published 2002
Conference Proceeding Book
3
Photomask and next-generation lithography mask technology IX : 23-25 April, 2002, Yokohama, Japan /
Published 2001
Book
4
22nd Annual BACUS Symposium on Photomask Technology, 1-4 October, 2002, Monterey, California, USA /
Published 2002
Conference Proceeding Book
5
Photomask and next-generation lithography mask technology X : 16-18 April, 2003, Yokohama, Japan /
Published 2003
Book
6
23rd Annual BACUS Symposium on Photomask Technology, 9-12 September, 2003, Monterey, California, USA /
Published 2003
Conference Proceeding Book
7
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany /
Published 2004
Conference Proceeding Book
8
Optical microlithography XIV : 27 February-2 March, 2001, Santa Clara, [California], USA /
Published 2001
Book
9
Photomask and next-generation lithography mask technology VIII : 25-26 April 2001, Yokohama, Japan /
Published 2001
Book
10
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA /
Published 2002
Book
11
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 15-16 January, 2002, Munich, Germany : proceedings /
Published 2002
Conference Proceeding Book
12
Advances in resist technology and processing VII : 5-6 March 1990, San Jose, California /
Published 1990
Book
13
Optical microlithography X : 12-14 March, 1997, Santa Clara, California /
Published 1997
Book
14
Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan /
Published 1994
Book
15
14th Annual Symposium on Photomask Technology and Management, 14-16 September 1994, Santa Clara, California /
Published 1994
Conference Proceeding Book
16
Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan /
Published 1995
Book
17
11th Annual Symposium on Photomask Technology, September 25-27, 1991, Sunnyvale, California /
Published 1992
Conference Proceeding Book
18
15th Annual Symposium on Photomask Technology and Management, 20-22 September, 1995, Santa Clara, California /
Published 1995
Conference Proceeding Book
19
16th Annual Symposium on Photomask Technology and Management, 18-20 September 1996, Redwood City, California /
Published 1996
Conference Proceeding Book
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