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1
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 13-15 January, 2003, Sonthofen, Germany /
Published 2003
Conference Proceeding Book
4
21st Annual BACUS Symposium on Photomask Technology, 3-5 October, 2001 Monterey [California], USA /
Published 2002
Conference Proceeding Book
5
Photomask and next-generation lithography mask technology IX : 23-25 April, 2002, Yokohama, Japan /
Published 2001
Book
6
22nd Annual BACUS Symposium on Photomask Technology, 1-4 October, 2002, Monterey, California, USA /
Published 2002
Conference Proceeding Book
7
Photomask and next-generation lithography mask technology X : 16-18 April, 2003, Yokohama, Japan /
Published 2003
Book
8
23rd Annual BACUS Symposium on Photomask Technology, 9-12 September, 2003, Monterey, California, USA /
Published 2003
Conference Proceeding Book
9
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany /
Published 2004
Conference Proceeding Book
10
Optical microlithography XIV : 27 February-2 March, 2001, Santa Clara, [California], USA /
Published 2001
Book
11
Photomask and next-generation lithography mask technology VIII : 25-26 April 2001, Yokohama, Japan /
Published 2001
Book
12
Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK /
Published 2001
Book
13
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA /
Published 2002
Book
14
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 15-16 January, 2002, Munich, Germany : proceedings /
Published 2002
Conference Proceeding Book
15
Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /
Published 1989
Conference Proceeding Book
16
Advances in resist technology and processing VII : 5-6 March 1990, San Jose, California /
Published 1990
Book
17
Optical microlithography V : 13-14 March 1986, Santa Clara, California /
Published 1986
Book
18
Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California /
Published 1984
Book
19
Optical microlithography IV : March 13-14, 1985, Santa Clara, California /
Published 1985
Book
20
Optical microlithography VI : 4-5 March 1987, Santa Clara, California /
Published 1987
Book
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