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T - Technology
Suggested Topics:
Integrated circuits
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Very large scale integration
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Book
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Call Number:
T - Technology
Suggested Topics:
Integrated circuits
AND
Very large scale integration
Format:
Book
Language:
Czech
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Design and construction
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Resists in microlithography and printing /
by
Bednář, B.
Published 1993
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Bednář, B.
1
Králíček, Jaroslav
1
Zachoval, Jaromír
1
Call Number
T - Technology
Suggested Topics
Design and construction
1
Integrated circuits
Lithography, Electron beam
1
Microlithography
1
Semiconductors
1
Very large scale integration
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X-ray lithography
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Rochester Institute of Technology
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