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4
21st Annual BACUS Symposium on Photomask Technology, 3-5 October, 2001 Monterey [California], USA /
Published 2002

Conference Proceeding Book
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6
22nd Annual BACUS Symposium on Photomask Technology, 1-4 October, 2002, Monterey, California, USA /
Published 2002

Conference Proceeding Book
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8
23rd Annual BACUS Symposium on Photomask Technology, 9-12 September, 2003, Monterey, California, USA /
Published 2003

Conference Proceeding Book
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10
Principles of lithography /
by Levinson, Harry J.
Published 2005

Book
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11
Optical microlithography XIV : 27 February-2 March, 2001, Santa Clara, [California], USA /
Published 2001

Book
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13
Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK /
Published 2001

Book
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14
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA /
Published 2002

Book
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16
Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France /
Published 1989

Conference Proceeding Book
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17
Advances in resist technology and processing VII : 5-6 March 1990, San Jose, California /
Published 1990

Book
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18
Optical microlithography V : 13-14 March 1986, Santa Clara, California /
Published 1986

Book
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20
Optical microlithography IV : March 13-14, 1985, Santa Clara, California /
Published 1985

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