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Electromechanical devices
Author:
National Institute of Standards and Technology (U.S.)
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Suggested Topics:
Electromechanical devices
Author:
National Institute of Standards and Technology (U.S.)
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Electromechanical devices
Micro-usinage
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Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas /
Published 1996
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Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas /
Published 1997
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Micromachined devices and components III : 29 September 1997, Austin, Texas /
Published 1997
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Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas /
Published 1995
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Format
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Author
National Institute of Standards and Technology (U.S.)
Semiconductor Equipment and Materials International
4
Society of Photo-optical Instrumentation Engineers
4
Chang, Shih-Chia
2
Pang, Stella W.
2
Chau, Kevin
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French, Patrick J.
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Markus, Karen W.
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T - Technology
4
Genre
Conference papers and proceedings
4
Congresses
4
Congrès
4
Suggested Topics
Electromechanical devices
Micro-usinage
4
Micromachining
4
Design and construction
3
Microelectromechanical systems
3
Microfabrication
3
more ...
Optical MEMS
2
Dispositifs électromécaniques
1
Micromechanics
1
Micromécanique
1
see all ...
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Institution
Rensselaer Polytechnic Institute
4
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English
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