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Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. /
Published 1988
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Specimen preparation for transmission electron microscopy of materials : symposium held December 3, 1987, Boston, Massachusetts, U.S.A. /
Published 1988
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Fundamentals of beam-solid interactions and transient thermal processing : symposium held November 30-December 3, 1987, Boston, Massachusetts, USA /
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Anderson, R. M. (Ron M.)
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Aziz, Michael J.
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Bravman, J. C. (John C.)
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Symposium on Polysilicon Films and Interfaces
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Tu, K. N. (King-Ning), 1937-
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Boston (Mass., 1987)
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Kongress
3
Materials
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3
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1
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1
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Dünne Schicht
1
Effect of radiation on
1
Effets du rayonnement sur
1
Electric properties
1
Electron microscopy
1
Elektronenmikroskopie
1
Faisceaux laser
1
Festkörper
1
Implantation
1
Integrated circuits
1
Ion implantation
1
Ions
1
Kongreß
1
Laser beams
1
Microscopie
1
Microscopie électronique
1
Microscopy
1
Polykristall
1
Präparation
1
Semi-conducteurs
1
Semiconductors
1
Silicium
1
Silicon
1
Strahlung
1
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1987
3
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Boston Mass
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Rensselaer Polytechnic Institute
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Rochester Institute of Technology
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