Laser chemical processing of semiconductor devices ; extended abstracts /

Bibliographic Details

Corporate Author:	Materials Research Society
Other Authors:	Houle, F. A., Deutsch, T. F., Osgood, R. M.
Format:	Book
Language:	English
Published:	Pittsburgh, Pa. : Materials Research Society, 1984.
Subjects:	Lasers in chemistry > Congresses. Microelectronics > Congresses. Semiconductors > Congresses. Lasers en chimie > Congrès. Microélectronique > Congrès. Semi-conducteurs > Congrès. Lasers in chemistry. Microelectronics. Semiconductors. Conference papers and proceedings.