Processing of electronic materials : proceedings of the First International Conference held at Santa Barbara, California, USA, February 23-28, 1987 /

Bibliographic Details

Corporate Authors:	International Conference on Processing of Electronic Materials Santa Barbara, Calif., Engineering Foundation (U.S.), National Science Foundation (U.S.)
Other Authors:	Law, Clarence G., Pollard, Richard
Format:	Conference Proceeding Book
Language:	English
Published:	New York, N.Y. : American Institute of Chemical Engineers, [1987]
Subjects:	Manufacturing processes > Congresses. Semiconductors > Congresses. Thin films > Congresses. Electronic industries > Congresses. Fabrication > Congrès. Semi-conducteurs > Congrès. Couches minces > Congrès. Industries électroniques > Congrès. Electronic industries. Manufacturing processes. Semiconductors. Thin films. Conference papers and proceedings.