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T - Technology
Author:
American Chemical Society. Meeting
AND
Willson, C. G. (C. Grant), 1939-
Suggested Topics:
Photoresists
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Call Number:
T - Technology
Author:
American Chemical Society. Meeting
AND
Willson, C. G. (C. Grant), 1939-
Suggested Topics:
Photoresists
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Materials for microlithography : radiation-sensitive polymers : based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of...
Published 1984
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Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Mee...
Published 1983
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Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the America...
Published 1994
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Materials for microlithography : radiation-sensitive polymers /
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Introduction to microlithography : theory, materials, and processing /
Published 1983
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Format
Book
5
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Author
American Chemical Society. Meeting
Thompson, L. F., 1944-
5
Willson, C. G. (C. Grant), 1939-
American Chemical Society. Division of Polymeric Materials: Science and Engineering
3
American Chemical Society. Division of Organic Coatings and Plastics Chemistry
2
American Chemical Society. Division of Polymer Chemistry
2
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Bowden, M. J., 1943-
2
Fréchet, J. M. J.
1
Fréchet, Jean M. J.
1
Kōbunshi Gakkai (Japan)
1
Tagawa, Seiichi
1
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Call Number
T - Technology
Genre
Conference papers and proceedings
3
Congresses
3
Congrès
3
Suggested Topics
Photoresists
Materials
3
Microelectronics
3
Microlithography
3
Polymers
3
Résines photosensibles
3
more ...
Congresses
2
Congrès
2
Matériaux
2
Microélectronique
2
Microlithographie
2
Photolithography
2
Polymères
2
Attaque chimique
1
Dielectrics
1
Diélectriques
1
Etching
1
Gravure par plasma
1
Lithographie
1
Lithography
1
Micro-elektronica
1
Photolithographie
1
Plasma etching
1
Polyimides
1
Polymeren
1
Semi-conducteurs
1
Semiconductors
1
see all ...
less ...
Institution
Rensselaer Polytechnic Institute
3
Rochester Institute of Technology
2
Language
English
5
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